Process vacuum


HORIZONTAL VACUUM FURNACES HINGED DOOR

  • In response to rapidly changing market requirements, it is the best solution to heat treatment need in the various fields of vacuum application. Wherever speed, compactness, precision and reliability are required, this vacuum furnace provides you with the most suitable answer in terms of automation and operational flexibility.
  • High flexibility combined with ease of maintenance for applications that require high standards of accuracy and precision.

HORIZONTAL VACUUM FURNACES CART BOTTOM DOOR

  • For applications that require higher repeatability and reproducibility of the results, the vacuum cart furnace is the cost-effective solution for large, dense loads. A highly functional system for heat treatments (hardening and tempering, ageing, stress relieving, solution treatment, annealing), as well as for brazing and diffusion bonding.
  • Unmatched capabilities for applications that require the smooth movement of large and/or heavy loads with maximum safety.

VERTICAL VACUUM FURNACES TOP OR BOTTOM LOAD

  • For applications that require higher repeatability and reproducibility of the results, the vacuum cart furnace is the cost-effective solution for large, dense loads. A highly functional system for heat treatments (hardening and tempering, ageing, stress relieving, solution treatment, annealing), as well as for brazing and diffusion bonding.
  • Simple, space-saving configuration – top or bottom load – for applications that require thermal treatment of vertical parts and components

E-BEAM, MAGNeTRON SPUTTERING system

  • The Explorer platform is a versatile high-vacuum R&D and pilot production platform that can be configured for electron beam (e-beam) evaporation, resistance evaporation, or magnetron sputtering. Ion-assisted deposition is available as an option in all three configurations. The Explorer is available in a semi-manual mode or can be upgraded to a fully automatic mode with one-push button automation to reduce system downtime.

IN-LINE MAGNETRON & PE-CVD SPUTTERING

  • The Phoenix in-line system offers high throughput for large volume production, and supports both planar and 3D component processing. This system can accommodate RF, AC, DC and pulsed DC sputtering as well as PE-CVD processes, and substrates or pallets up to GEN 3.5 glass size (600mm X 720mm). The Phoenix in-line automation conveys a flat pallet or carrier through the system’s linear chambers. The system can be configured with Denton’s proprietary optical process control system or color control system (patent pending).

DISCOVERY MAGNETRON SPUTTERING SYSTEM

  • The Discovery Magnetron Sputtering system offers versatility and reliability while meeting high-volume production needs. The system can either accomodate a single cathode high uniformity configuration for high-volume manufacturing, or up to 4 confocal cathodes with triaxis adjustment of offset, target to substrate distance, and angle for uniform coating. Each cathode can be optimized for a different deposition method or target material.

Desktop Pro Thin Film Deposition Solution

  • If lab space is a concern for you, the compact, high-vacuum Desktop Pro sputtering system offers superior productivity yet occupies less than 36 inches (914 mm) of desk space. Truly versatile, the Desktop Pro can provide for co-sputtering and the deposition of magnetic and/or dielectric materials. The Desktop Pro supports one or two cathodes in a confocal configuration, delivering high film uniformity over a 4-inch diameter. Able to pump down to high vacuum (10-6 torr range) in less than 30 minutes, it’s the perfect solution when fast change-overs are needed within multi-user environments.

Integrity Thin Film Deposition Solution

  • For high-volume production, the Integrity system is the right choice. This system is configured for demanding optical, semiconductor and compound semiconductor applications. This solution offers high yield, stress control, high deposition rate, PID control, optimal grain size and film crystallography. Denton offers application-specific tools pre-configured to meet demanding process requirements.

DV-502 Thin Film Deposition Solution

  • The DV-502 Thermal Evaporation system evaporates many of the metals and compounds involved in optical coatings, metalization, and electron microscope specimen preparation with no discernable contamination. The DV-502 also offers flexibility with a range of configurations available to meet your needs, including evaporation from a range of sources such as tungsten filaments, wire baskets, foil boats, baffle box heaters as well as carbon rod or yarn accessories.

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